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Evaporation Materials
Ceramic Targets
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Product name : Tantalum Sputtering Target
Product No. : 2021913152533
Material : Ta
Size : Φ(25mm-800mm) x (3mm～28mm); (1mm～25mm)x≤(10mm-800mm)x≤2000mm
Density(g/cm3) : 16.6
Refractive Index :
Form : Grey round, square
Purity : 3N, 4N, 5N
Application : Semiconductor and optical coating
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| Details: |
Tantalum target: tantalum plane target, tantalum multi arc target
Grade: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)
Tolerance: Dia tolerance + / - 0.254;
Recrystallization: ≥95%;
Grain size: ≥40μm；
Surface roughness: ≤Ra 0.8;
Flatness: ≤0.1mm or 0.10%
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